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To: Tulvio Durand who wrote (1444)	3/8/1998 9:37:00 PM
From: LLCF	Read Replies (1) of 2946

< I understand the orthogonality argument, and agree with your explanation. But I don't believe that the stepper/scanner is unique to SVGI. ASM also makes stepper/scanners, and I believe that Nikon and Canon make them as well. So I don't see how SVGI has something that's unique here. > 1.) SVGI's "step and scan" technology is supposedly ahead of the competition according to their CEO Papken der Terossian... having a larger field of view and more accuracy for lithography of the "critical layers" 2.) In Cymers conference call last fall Cymers ceo also made comments about SVGI's unique technology allowing the current available light sources (as opposed to cymers new source coming out this year) to go to lower u linewidths than the competition. He did not elaborate why this was possible. 3.) I also read on the "General Lithography" thread months ago something about a patented way the SVGI parts offsetting movement lowers vibration levels or some such thing... cant substantiate, and don't know of any patent that is critical to their supposed advantage. 4.) Cannon and Nikon have stated that they have had production problems with their scanners. Havent elaborated. I don't believe they have advanced machines (competion to SVGI's scanners) on a production basis. 5.) SVGI has shipped WAY more of these advanced machines for critical layers than anyone including ASMLF which I believe shipped their first production machine within the last 6 months All this said... I've also heard people including Terossian talk of SVGI's lead in terms of time... implied IMO that others would catch up. That was 6-9 months ago... head time frames as low as a 1 year advantage which may be all but gone now. "Whew".... all this is from memory please point out any mistakes folks. DAK

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