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Technology Stocks : General Lithography

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To: Artslaw who wrote (880)	3/11/1998 3:37:00 AM
From: Andrew Vance	of 1305

Thank you for you comments. They are very welcome and appropriate. I have admitted that the silicon stuff was not my area of expertise. As you can see from my response, data was very limited and inputs from the people I rely on as experts was not readily provided. I have no argument with the purity comments either. Left to my own resources, I obviously misinterpreted the words. But again, it is absolutely great that you have provided your ecpertise to rectify this. My understanding is that Ferrofluidics provides the crystal seed also. I wonder if FERO is a mistake on my part and that there is a ferrofluidics division of either WFR or their parent company Huls. Actually for MEMS, precise crystal orientation relative to the flat is extremely important when KOH is used to etch through the silicon. I do remember that in IC production at least 2 orientations were used over my career. We knew which orientation it was by the location of the secondary flats. I am glad you added your expertise to this conversation and I am sure everyone else appreciates it also. Keep up the good work. Andrew

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