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Technology Stocks : General Lithography

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To: Volsi Mimir who wrote (898)	3/13/1998 8:43:00 AM
From: Katherine Derbyshire	of 1305

>>KD Good day In your brief of your last article (portion below)you mentioned gates and sharpness (electron dissipation (my comment)).Here is a link to Cymer and BillyG has a new news item on Hatachi's tools.Does Hatachi's electron microscopic tool HD 2000 address the metrology issue that one could tell if that (bleeding) is happening.<< The Hitachi tool answers a different question. Transistor short channel effects are easy to detect. They show up in the device's electrical characteristics. Problem is, they are a fundamental physical result of making devices that small with that structure, so you can't get rid of them unless you change the device structure. Now, the channel in a transistor is basically an electrical feature. One region of the silicon wafer has a different dopant content, giving it different electrical properties. Standard electron microscopy (which the Hitachi tool basically is) can't see electrical features at all. The Hitachi tool is more appropriate for questions like: Is this film structured the way it needs to be? Are all the films in this multilayered structure the correct thickness? And so on. Does that help clarify things? Katherine

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