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Technology Stocks : Dupont Photomasks (DPMI)
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To: Larry Brew who wrote (367)3/14/1998 8:57:00 PM
From: Duane L. Olson  Read Replies (1) of 955
 
Larry, Personally, I had thought that the limit for the ArF Eximer lasers (193 nm) was .13u features (DPMI had already announced plans to install equipment capable of producing masks supporting features to .13u at their new operations in LSI facilities at Gresham).. Katherine Derbyshire (who did the best writeup on the UT work) supports your point about costs beyond 193nm...http://www.exchange2000.com/~wsapi/investor/reply-3683903
But the UT work at .08u was ALSO done with an ISI stepper and a CYMI ArF eximer laser (at 193 nm)...which is why a specialized phaseshift photomask from DPMI was required, as I understand it.
Although the photomasks are going to be quite expensive, however, it appears they are still MUCH less costly than the direct write methodologies... is that your understanding also?....TSO
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