SI
SI
discoversearch

We've detected that you're using an ad content blocking browser plug-in or feature. Ads provide a critical source of revenue to the continued operation of Silicon Investor.  We ask that you disable ad blocking while on Silicon Investor in the best interests of our community.  If you are not using an ad blocker but are still receiving this message, make sure your browser's tracking protection is set to the 'standard' level.
Technology Stocks : General Lithography
 Public ReplyPrvt ReplyMark as Last ReadFilePrevious 10Next 10PreviousNext  
To: TI2, TechInvestorToo who wrote (938)3/23/1998 1:41:00 PM
From: Katherine Derbyshire  Read Replies (1) of 1305
 
The new Canon stepper is probably this one (press release this morning):

FPA-3000i5+ Specifications

Lens Magnification 5:1 Reduction Ratio
NA 0.45-0.63 Variable
Resolution Less than 0.35 micron
Exposure Field 22 x 22mm
Illumination 365nm
Wafer Size Maximum 8 inches
Reticle Size 6 inches
Alignment Accuracy Less than 40nm (|m|+3sigma)
Throughput 100 WPH (8-inch wafer, 90mJ/cm2)

Another high throughput, mix-and-match i-line tool.

Katherine
Report TOU ViolationShare This Post
 Public ReplyPrvt ReplyMark as Last ReadFilePrevious 10Next 10PreviousNext  

HomeMailHotSubjectMarksPeopleMarksKeepersSettings
Terms Of UseContact UsCopyright/IP PolicyPrivacy PolicyAbout UsFAQAdvertise on SI
© 2025 Knight Sac Media.  Data provided by Twelve Data, Alpha Vantage, and CityFALCON News