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Technology Stocks : General Lithography

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To: LLCF who wrote (942)	3/23/1998 8:18:00 PM
From: James Word	of 1305

David: "have Nikkon or Cannon shipped production versions of sub u.25 tools that you know of?" Ive had discussions with all the big stepper suppliers. The only steppers you can buy right now are guaranteed to 0.25um resolution, not below. If you use off-axis they will spec their systems maybe down to 0.22um or 0.2um. Off-axis is not usable by logic IC manufacturers due to the pattern dependent nature of OAI. Sub 0.25um systems will not show up for another 9-12months. Anyone doing pruduction below 0.25um is going into uncharted territory. An improvement in optics quality (reduced aberrations) is the goal of most of the stepper vendors. SVGL has a slight edge since they have mastered scanning technology (at least more so than the other 3 guys) and scanning is necessary for 0.18um production with 248nm illumination. I would expect to see beta tools using 193nm ArF excimer laser illumination by mid-1999. James Word

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