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Technology Stocks : Cymer (CYMI)
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To: Tulvio Durand who wrote (16058)3/26/1998 6:51:00 PM
From: Elroy Jetson  Read Replies (2) of 25960
 
The Korean press release is correct on a technicality. The UV light (mercury vapor) currently used in fabs cannot get down to these smaller rule sizes. You need a smaller wavelength such as a Cymer Deep UV laser, or Extreme UV laser (which is nearly x-ray), or an x-ray source.

X-ray equipment has a long way to go and will be more expensive, while DUV and EUV will produce smaller and smaller size rules as the technology progresses. The change-over from DUV to EUV is off in the future. The change-over from EUV to x-ray is even further off in the future.
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