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Technology Stocks : Cymer (CYMI)
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To: j t jackson who wrote (16091)3/28/1998 11:02:00 PM
From: James Word  Read Replies (1) of 25960
 
jt jackson: RE: "Is there a simple explanation of why i-line extension to 0.25um DRAM is easier than to 0.25um logic ICs:

Yes. Memory products contain simple, repetitive structures. In some
cases the patterns on the mask (reticle) are nothing more than
2 dimensional arrays or rectangle, lines, and holes. This symmetry
allows simple application of resolution enhancement techniques
such as Optical Proximity Correction, Off Axis Illumination, and
Phase Shift Reticles. These help to extend the life of old technology such as i-line.

James.
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