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To: Mr. Aloha who wrote ()	3/30/1998 1:31:00 PM
From: Paul Dieterich	Read Replies (1) of 582

Here's the DJ copy on the new laser: Cymer Unveils ELS-5010 Krypton Fluoride Laser Dow Jones Newswires -- March 30, 1998 SAN DIEGO (Dow Jones)--Cymer Inc. (CYMI) unveiled the ELS-5010 krypton fluoride 248nm laser. In a press release, Cymer said the ELS-5010 is designed to address next-generation stepper and scanner applications with 0.7 NA lens designs - offering tighter resolution capabilities through narrower bandwidths. In addition, the ELS-5010, which is now available to meet volume market demand, delivers improved energy stability to enable higher device yields. Cymer said it is getting strong global interest in the ELS-5010 in the DUV lithography marketplace, and has begun shipping the ELS-5010 this quarter for use in the manufacture of next-generation devices. In addition, the company has received "significant" orders for the ELS-5010 for 1998. Cymer provides excimer laser illumination sources for use in deep ultraviolet photolithography systems targeted at the pilot and production segments of the semiconductor manufacturing market.

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