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Politics : Formerly About Advanced Micro Devices

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To: Yousef who wrote (31700)	4/11/1998 8:45:00 AM
From: Maxwell	Read Replies (3) of 1573683

Yousef: The specs you gave me for the 0.18um looks pretty old technology to me. You will have difficulties getting into the Gigahertz range. #1) Your contact resistances using tungsten via of 0.24um will kill you. Even for a very short plug the resistance can be very high. #2) I am not sure on the TiSi2. Many companies and universities have reported that as the gate drops below 0.2um the TiSi2 formation is no good and the resistance can go up by an order of magnitude. #3) HDP will have a very cost of ownership and very poor throughput. Probably won't help you much. There are plenty of stuffs out there that have K down to as low as 2.5. #4) No need to go to low-K. I can tell you now that your R will dominate your C. C doesn't really come in till you pass the Gigahertz limit, especially at least 2GHz. Just in summary, this 0.18um process of yours or whoever you work for is only for low performance chips. IBM's copper technology using dual damascene is easier to work and is a superior process. Maxwell

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