Lambda Physik. Go to the link, scroll down, and click on "The Fab Line".........
sumnet.com
<<Lambda Physik received a $6.7 million order for its Lambda 4000 excimer lasers from Japan
Steel Works. These lasers, to be delivered within 1998, will be integrated into systems made
by Japan Steel Works for thin-film transistor (TFT) annealing in the production of active-matrix
liquid crystal displays (AMLCDs). This is the largest single order in the company's history, and
also includes beam homogenization and line generation optics produced for Lambda Physik by
Microlas GmbH.
[I didn't know that excimer lasers were used for TFT annealing -- another application...]
Lambda Physik also revealed that it now offers an argon fluoride (ArF) excimer laser series that
meets the demands of all 193-nanometer production microlithography systems. The series
includes the new NovaLine Litho 193-0.7, an ultra-narrow-bandwidth source designed for
refractive and catadioptric lithography systems. This is complemented by the NovaLine Litho
193-25, intended for use in catadioptric scanners. The bandwidth of the NovaLine Litho
193-0.7 is 0.35pm, which Lambda Physik claims is the smallest ever achieved in an industrial
ArF laser for deep-ultraviolet lithography. Pricing for the new system was not available at press
time. >> [No pricing -- it must not be in production yet.]
Also of interest:
<<Cognex Corp. entered into a multimillion-dollar OEM agreement with Nikon. Under the terms
of the agreement, Cognex will supply in excess of $5 million of machine vision systems over the
next two years for integration into Nikon's newest generation of wafer steppers. Nikon's
steppers will rely on Cognex's 4000 Series machine vision systems to ensure that the wafer is
positioned to submicron accuracy so that the IC patterns will be transferred to the correct
location. "This order is a very important one for Cognex for many reasons. It is a sizable order.
It is from one of the world's most respected companies. And, it opens up additional
opportunities for us to work together in the future," said Cognex CEO Robert J. Shillman. >> |
