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Technology Stocks : Cymer (CYMI)
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To: Zeev Hed who wrote (16824)4/22/1998 10:59:00 AM
From: Tulvio Durand  Read Replies (1) of 25960
 
Last September Akins said they are using rapid discharge of stored electric energy, as in the plasma created from shorting a charged capacitor, to create the soft X-rays. He was adamant in his view that soft x-rays and, in particular, Cymer's proprietary electric discharge technique for generating them, was the most viable approach to EUV lithography. Tulvio
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