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Technology Stocks : General Lithography
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To: Andrew Vance who wrote (980)4/28/1998 7:49:00 PM
From: Investor2  Read Replies (2) of 1305
 
"Semiconductor Business News, c 1998, CMP Media Inc.
April 1998

Optical litho is still alive and kicking

Looks good for 0.07-micron production. Evidence is growing that the old chip-printing process may even outlast the half-dozen "advanced" litho technologies being developed to replace it.

... Laboratory researchers in both the U.S. and Japan have now demonstrated 0.07-micron technology using a small field size, 193-nanometer wavelength stepper from Integrated Solution Inc. of Austin, Tex. While competitors working on advanced non-optical techniques were quick to say that such one-of-a-kind, controlled lab experiments prove very little in the race to develop production-worthy sub-0.1-micron tools, others disagreed."

pubs.cmpnet.com

Best wishes,

I2

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