News - Multiple Versalocks To Kionix
ST. PETERSBURG, Fla., May 5 /PRNewswire/ -- Plasma-Therm, Inc. (NASDAQ:PTIS) announced today the sale of multiple Versalock(R) plasma processing systems to Kionix, Inc., a leading manufacturer of MicroElectroMechanical (MEMS) devices.
The systems incorporate a number of Plasma-Therm's advanced process technologies, including Inductively Coupled Plasma (ICP) etching and High Density Plasma (HDP) deposition. The systems will be used by Kionix in conjunction with the manufacturing of silicon MEMS products.
Dr. Jay Sasserath, the Company's Vice President, Strategic Marketing, stated "This is a significant order for Plasma-Therm since it represents further acceptance of the Versalock platform within the MEMS industry. In addition, this is the first order for a High Density Plasma deposition system in the MEMS market. By combining both the ICP and HDP technologies in the MEMS fabrication process, Kionix will be able to offer its customers a complete line of advanced devices."
Dr. Gregory Galvin, President and CEO of Kionix, Inc., added, "We chose Plasma-Therm as a result of the solid relationship that our companies have had in the past. As a current Plasma-Therm customer, we've worked closely on a number of programs and have been very successful. In addition to Plasma-Therm's reputation for outstanding field support, the purchase of these production systems was based upon the ability of the Plasma-Therm team to work with Kionix in providing a full suite of process technologies."
The statements contained in this release which are not historical facts may be deemed to contain forward looking statements....
Plasma-Therm Inc., headquartered in St. Petersburg, Florida, is a leading producer of plasma process equipment primarily used by manufacturers requiring expertise in thin film etching and deposition. More information about PTI may be obtained by visiting our website at plasmatherm.com |
