Ultratech acquires assets of ISI for move into DUV lithography...........
pubs.cmpnet.com
Ultratech acquiring ISI assets to move into DUV lithography
SAN JOSE--In a move to broaden its lithography product offerings,
Ultratech Stepper Inc. here today announced it has agreed to acquire the
assets of privately-held Integrated Solutions Inc., which produces i-line and
deep ultraviolet (DUV) systems.
ISI has operations in Tewksbury, Mass., and Austin, Tex. The company has
been involved in a number of research efforts aimed at pushing lithography
down to 0.13-micron feature sizes and below using 193-nanometer argon
fluoride laser technology. ISI's products were developed under an R&D
grant from Sematech with U.S. government funding.
"The acquisition of ISI's assets positions Ultratech to offer customers a
broader range of lithography solutions, including our patented 1X and
e-beam technologies, and now i-line and deep UV reduction steppers," said
Arthur W. Zafiropoulo, chairman and CEO of Ultratech. "ISI's lithography
products are an outstanding addition to our portfolio, as they offer the
combination of productivity and cost-effectiveness that is the cornerstone of
Ultratech's corporate strategy." The terms of the acquisition were not
disclosed, and the transaction is expected to be completed within 30 days,
according to Ultratech.
He said the acquired reduction stepper series will be focused on disk drive
and selected semiconductor market applications. Ultratech said the
reduction stepper product line will continue to operate in the Massachusetts
location, which has an experienced technical staff to support the growth of
this operation. |
