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Technology Stocks : General Lithography

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To: Volsi Mimir who wrote (791)5/22/1998 10:15:00 AM
From: curtis fincher  Read Replies (1) of 1305
 
With regards to Willson's 193nm resist keep in mind that there are no full field steppers available at the moment. In fact there is only one in existence at MIT/Lincoln labs. Everyone is relegated at the moment to use of the ISI micro stepper. In addition considerable work remains to bring that 193nm resist to production. Most likely will be that many 193 resist will find their way into use as 248 substitutes and eventually be used for both. A lot of work remains before anyone implements 193 in production.
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