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Technology Stocks : General Lithography
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To: jeffbas who wrote (1019)5/28/1998 9:56:00 PM
From: Katherine Derbyshire  Read Replies (2) of 1305
 
The V2000 is a vector scan tool. It "draws" the features on the mask. The ETEC tools are raster scan. They scan the entire substrate, and flip on and off as needed to create the features. UTEK claims that vector scan is better for complex masks because it's faster and the data volume is smaller. ETEC claims otherwise.

At least part of UTEK's interest in mask making is probably due to the need to have a reliable supply of 1X masks to support their exposure tools. 1X masks have inherently higher data densities than 4X masks, so any advantages of vector scanning should be especially noticeable.

Katherine

PS Yes, Ian, Art really does have 6 Ferraris. He's legendary in Silicon Valley.
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