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Politics : Formerly About Advanced Micro Devices
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To: FJB who wrote (33492)6/22/1998 2:15:00 AM
From: Yousef  Read Replies (1) of 1573213
 
Bob,

Re: "Could you clarify some terminology for me?"

I will tell you my terminology ... Most Fab parameters have an upper
spec, lower spec and nominal (usually center of spec ... but not always).
The nominal is the target for the average of the distribution. So
nominal gate CD is the average printed poly CD in this terminology, while the
fast case refers to the high drive current case which is the lower spec of the
printed poly CD's. Leff is the electrical poly length that is calculated/extracted
from the electrical FET test data. Leff is typically .05um - .08um smaller
than the printed gate poly CD.

Example:

Lower Spec - .18um ... rework wafers with narrower CD's
Nominal - .20um
Upper Spec - .22um .... rework wafers with wider CD's
Fast Case = Lower Spec = .18um
Leff = (Nominal - .08um) = .12um

Make It So,
Yousef
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