TRIKON TECHNOLOGIES AND LSI LOGIC ANNOUNCES JOINT
DEVELOPMENT OF LOW K DIELECTRIC APPLICATIONS
09:17 a.m. Jun 23, 1998 Eastern
NEWPORT, Wales--(BUSINESS WIRE)--June 23, 1998--Trikon Technologies, Inc.
(Trikon) (NASDAQ:TRKN) announced today that it had reached agreement with
LSI Logic Corporation, Santa Clara CA (NASDAQ:LSI) to jointly develop low K
dielectric applications for Flowfill on sub 0.25 micron devices.
Low K dielectric materials allow semiconductor devices to operate at higher signal
speeds than current dielectric materials allow.
"The importance of low K dielectric material to LSI Logic's technology roadmap will
drive acceleration of this joint development program" said Rich Schinella, Vice
President Wafer Process R&D and Santa Clara Operations, LSI Logic. "Flowfill low
K offers potential for ease of integration over competitive approaches. We have
enjoyed a long working relationship with Trikon, who have supported us well over the
years."
"We have worked with LSI Logic and their engineers for many years and greatly
respect their engineering and manufacturing capabilities and experience" said Dr.
Adrian Kiermasz, Vice President of Technical Marketing at Trikon. "This joint
development will enable us to refine our Flowfill equipment and processes so that we
can better meet the industry's critical demands. Most low K materials present major
challenges to CMP and barrier processing. We believe that our unique process offers
significant advantages in these areas.
"A close relationship with a leading edge user like LSI Logic will accelerate our
developments and ensure Trikon offers production-ready equipment and processes to
meet the industries most critical specifications. We are pleased to be working with
LSI Logic on this."
Trikon provides a broad line of advanced manufacturing systems used for three of
the major processing steps in the manufacture of a semiconductor device: physical
vapor deposition (PVD), chemical vapor deposition (CVD) and etch. Trikon's
corporate headquarters and main manufacturing site are located in Newport, South
Wales, United Kingdom.
"Safe Harbor" Statement Under the Private Securities Litigation Act of 1995: This
press release contains certain forward-looking statements, including, but not limited
to, the potential applications of low K Flowfill, the advantages that low K Flowfill
might offer and the acceleration of the development of Flowfill products. These
statements are subject to various risks and uncertainties that could cause results to
differ materially, including, but not limited to, management of joint development
efforts, economic and political developments in Asia, semiconductor industry
conditions and changes in technology. For other risks attendant to Trikon and the
semiconductor manufacturing equipment industry, please see the Company's SEC
reports, including, without limitation, its annual report on Form 10-K, quarterly reports
on Form 10-Q and current reports on Form 8-K.
Copyright 1998, Business Wire
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