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To: Douglas Rhodes who wrote (519)	7/6/1998 11:53:00 AM
From: Melkon Khosrovian	Read Replies (2) of 582

Canon To Sell 0.18 Micron Steppers In October Monday July 6 10:23 AM EDT TOKYO (Reuters) - Canon said today it would start shipments in October of the world's first 0.18 micron excimer laser scanning stepper for mass output of semiconductor chips. The new stepper, capable of etching semiconductor circuits finer than 0.18 micron, is designed for volume production of next-generation 256-megabit dynamic random access memory (DRAM) chips and microprocessors on either 200 mm or 300 mm wafers, Canon said in a statement. Steppers currently used by chip makers other than for research and developmental uses have 0.25 to 0.20 micron line widths and make chips on 200 mm wafers, a company spokesman said. Canon aims to sell 200 units of the new stepper in the first year of sales, the company statement said. The stepper's base price will be 830 million yen, it said. dailynews.yahoo.com

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