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Technology Stocks : Cymer (CYMI)
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To: acidman who wrote (18757)7/26/1998 9:32:00 PM
From: Zeev Hed  Read Replies (1) of 25960
 
acidman, e-beam "could be used" for "etching patterns etc...", but that would be like killing a fly with a 12" naval gun. The technology that will, supposedly, supplant lasers in DUV lithography (or I should actually say supplant lithography) is X-rays, but the road map all the way down to about .08 micron using various lasers is already laid out, so CYMI has a minimum of 5 years and probably at least 10 years before it sees abatement of the need for its technology. Consider that .08 microns is about 20 lattice distance in silicon, that will be quite close to the absolute limit of feature size reduction expected with traditional semiconductors (you are getting pretty close to dimensions where tunneling effects will come into play).

Zeev
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