Formerly About Advanced Micro Devices Message Board

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Politics : Formerly About Advanced Micro Devices

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To: Maxwell who wrote (35175)	7/29/1998 1:14:00 AM
From: Paul Engel	Read Replies (1) of 1572857

Maxwell - Re: " The barrier layer is TaN. The sidewall coverage is 50A! " I think you'll find 50 A barrier layers are a disaster. Most work today uses barrier films (TiN mostly but some use TaN) of 15 to 30 Nanometers = 150 to 300 Angstroms. Multiplying this by 2 (two sidewalls) and you have 300 to 600 A of an 1800 A (minimum) trench consumed by barrier films. Hence, 16 to 32% of the THEORETICAL copper line width isn't even copper! Bye Bye copper advantage! Paul

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