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Politics : Formerly About Applied Materials
AMAT 220.17-6.4%3:59 PM EST

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To: Big Bucks who wrote (23846)9/5/1998 9:49:00 PM
From: Katherine Derbyshire  Read Replies (3) of 70976
 
>> EUV and DUV (extreme and deep
UV) lithography as well as Xray lithography and high density
inductive ot transformer coupled plasma etching is hot and
gaining momentum for sub 0.25uM features<<

I agree with you re: etch, but beg to differ re:litho. EUV is way out. Sub-0.10 micron, if ever. X-ray is not quite as far out, maybe 0.13micron or so, but is also very much an "if" not a "when." DUV (248nm) is the thing for 0.25-0.18, with 193nm probably coming in after that.

Katherine
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