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Politics : Formerly About Applied Materials
AMAT 220.28-6.4%Nov 20 3:59 PM EST

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To: Katherine Derbyshire who wrote (23848)9/6/1998 9:31:00 AM
From: Proud_Infidel  Read Replies (2) of 70976
 
Katherine,

You sound as if you believe X-Ray will be implemented sometime around .13mu. The test earier this March at the U of Texas showed the viability of 193nm lasers and photomasks down to .07(or .09????). I am curious as to your thoughts regarding the implementation of DUV well down to .07.

TIA

BK
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