Maybe this explains SFAM's nice move on a tough day:
SpeedFam Develops Two New Advanced Memory Disk Processing Tools
CHANDLER, Ariz., Oct. 1 /PRNewswire/ -- SpeedFam International, Inc. (Nasdaq: SFAM - news), a leading supplier of high-throughput chemical mechanical planarization (CMP) systems for the semiconductor industry, as well as flat surface processing systems for the thin film memory disk media and silicon wafer industries worldwide, today introduced two new processing tools for advanced thin film memory disk media processing. These new fully automated tools, the Pegasus and the Nanopolisher, offer memory disk manufacturers exceptional media preparation technology for both nickel disks and alternative substrates.
The Pegasus, a high-throughput tool, improves performance and yield due largely to its new rigid frame design. This new design features a three-column upper plate support structure that assures consistent placement of the upper platen over the material to be processed. The Pegasus increases yields by using a highly reliable automation scheme, thus minimizing defects and damage associated with disk handling. In addition, the tool features temperature-controlled upper and lower plates for complete control over the working environment, four independent servo-motor controls for maximum process flexibility, a PC-based software system that allows for integration into other
equipment, and a completely new pressure-control system for tight-tolerance process pressure accuracy.
The Nanopolisher is a cassette-to-cassette, second-step processing tool that provides user-specified cross-hatch or circumferencial pattern capabilities. The enclosed process environment eliminates foreign-object contamination and makes the tool suitable for clean room environments. It utilizes standard polishing slurries and pads for low cost of ownership and is capable of creating nickel disks with an average surface roughness of less than 2 angstroms and minimal handling damage. The modular design provides for manufacturing flexibility, and when coupled with the Pegasus, completes a cassette-to-cassette first- and second-step polishing system.
Makoto Kouzuma, president and chief executive officer of SpeedFam International, said, ''This milestone demonstrates SpeedFam's commitment to continually evolving our equipment to satisfy our customers' needs and lead the industry into the future. In an industry that is struggling, these cost-effective solutions answer our customers' needs.'' |
