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To: FJB who wrote (1873)	10/3/1998 12:51:00 PM
From: James Word	Read Replies (1) of 2946

Robert: "will they be able to achieve these types of resolutions with the original DUV steppers they have in place" If they don't have any money (I think that's fair to say about DRAM manufacturers) then that's really the only choice, although maybe not a desirable one. Most DRAM manufacturers are quite comfortable using phase shift reticles and off axis illumination to enhance resolution. Using PSM and OAI you can push I-line to around 0.25um and probably 248nm DUV to 0.15um. The main reason that the DRAM guys may want to go to scanners would probably not be CD control. It would probably be field size and higher NA (lower resolution). Its the MPU manufacturers that really need the scanners to control CDs. They don't have the luxury of using OAI and PSM. Yes, PSMs are expensive, but remember alot of the DRAM companies have their own mask development shops. Also, you only need a few critical level reticles to mass produce millions of chips since their volumes are so high and number of mask sets are so low. Yes, OPC at 0.18um seems to be a given and binary masks will still rule the day. Nobody outside of memory manufacturers is seriously considering PSM until maybe the 0.15 or 0.13 micron generation. James Word

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