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Politics : Formerly About Applied Materials

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To: Math Junkie who wrote (25706)	10/23/1998 6:12:00 PM
From: Katherine Derbyshire	Read Replies (1) of 70976

It's oversimplifying quite a bit to declare that in situ inspection is too expensive across the board. Using a standalone inspection tool to determine endpoint for an etch or CMP step, for instance, would mean removing the tool from the chamber, inspecting it, and putting it back, repeatedly. An in situ sensor could simply turn the etcher or polisher off when endpoint was reached. As I said before, the two approaches complement each other. Katherine

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