Formerly About Advanced Micro Devices Message Board

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Politics : Formerly About Advanced Micro Devices

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To: kash johal who wrote (40169)	10/26/1998 8:57:00 PM
From: Yousef	Read Replies (1) of 1574000

Kash, Re: "Cobalt silicide ... Would this be for 0.25 micron volume now or is this 0.18 Cu future type of stuff." Cobalt silicide will not be used by Intel at either .25um or .18um . Titanium silicide is the choice at these dimensions. the problem is that as linewidth is reduced (to around .15um), TiSi2 line resistivity goes up considerably (10X). The advantage of CoSi2 is that the resistivity doesn't go up as much ... However, CoSi2 might have more integration/yield problems that need to be solved. I believe that DEC has used CoSi2 for some time (.35um & .25um). Make It So, Yousef

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