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To: Clarksterh who wrote (20083)10/29/1998 12:39:00 PM
From: FJB  Read Replies (3) of 25960
 
Clark, what they said was that 25% of all layers are made with DUV, but it wasn't clear to me whether this was in chips that are smaller than 0.25u or in all chips. I strongly suspect the former, not the latter, since there are still quite a few people out there using >0.25u feature size.

You are correct. The most advanced MPU and DRAM designs currently in production still use DUV for less than 25% of all layers. Since these leading edge designs represent a small fraction of total capacity, it follows that the total number of layers industry-wide employing DUV must be much lower.

Bob

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