Veeco Instruments-Who? Message Board

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Technology Stocks : Veeco Instruments-Who?

VECO 28.79

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11:31 AM EST

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To: ET who wrote (1622)	11/5/1998 11:21:00 PM
From: Carl R.	Read Replies (1) of 3069

I presume that you are talking about the paragraph near the bottom that talked about the use of Nanometrics, Nova and Luxtron tools: ...Applied recently added a second in situ metrology option to its Mirra CMP systems that measure layer thickness while the wafers are still wet and inside the tool. They use an embedded system from Israel's Nova Measuring Instruments Ltd. A dry measurement system from Nanometrics Inc. in Sunnyvale, Calif., also is available to compare pre- and post-polishing thickness. Other vendors are using a variety of end-point detection techniques to determine precisely when polished layers are flat enough for Post-CMP cleaning and the next process steps. IPEC, for example, is offering both the Nova metrology system and an in situ end-point detection system from Luxtron Corp of Santa Clara, Calif., that measures the motor current in CMP tools to determine when a particular layer of metal or oxide is removed. I don't think VECO is involved in in-situ equipment for this application. Carl

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