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To: Richaaard who wrote (6986)	11/13/1998 1:35:00 AM
From: timwa	Read Replies (1) of 9695

XRL articles if you want to get techie... Semiconductor online has recently published a series of articles about the current state of XRL. Status and Future of X-Ray Lithography Part I: Production of VLSI Devices news.semiconductoronline.com Part II: Masks for X-Ray Lithography news.semiconductoronline.com Part III: CD Control and Overlay news.semiconductoronline.com Part IV: Cost of Ownership and Extendibilty of X-Ray Lithography news.semiconductoronline.com

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