some info on the new fab.
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GaSonics Receives Follow-on Order From Vitesse Semiconductor; PEP System to be Used in World's First 6-Inch Production Gallium Arsenide Fab
SAN JOSE, CALIF. (Nov. 17) BUSINESS WIRE -Nov. 17, 1998 -- GaSonics International (Nasdaq NM:GSNX) today announced it has received a follow-on order from Vitesse Semiconductor (Camarillo, Calif.) for its Performance Enhancement Platform (PEP) system. The system, configured with a photoresist removal chamber and a low-temperature clean chamber, will be installed in the Vitesse Pierre Lamond Wafer Fabrication Facility in Colorado Springs, Colo. -- the industry's first 6-inch Gallium Arsenide (GaAs) fab.
Commenting on the order, GaSonics Vice President of Sales and Field
Operations Bill Alexander noted, "GaAs integrated circuits (ICs) have
become an enabling technology in the production of today's advanced telecommunication and data communication products. Because GaAs conducts current better than silicon, it offers significant performance advantages for high-speed applications. Being able to apply our technology to the manufacture of 6-inch GaAs wafers presents additional sales potential for the company beyond our traditional semiconductor markets."
Robert West, Vitesse equipment engineering manager, noted, "Our
decision to purchase this third PEP system from GaSonics is based on
our success with our existing installed base of these tools. GaSonics'
performance has served as the benchmark for all of our vendors at this site. The responsiveness and customer support we have received from GaSonics while addressing the challenges of ramping up the world's first 6-inch production fab have been excellent. In addition, the PEP systems have been very reliable and met our criteria for tool uptime, as well as demonstrated flexibility from both a process and platform perspective."
Vitesse's new 6-inch GaAs fab is equipped with the most advanced
semiconductor processing equipment for volume production and testing of high-speed ICs. Vitesse reports that the facility will support both current generation technology and future technology development. The GaSonics PEP system, which shipped in September 1998, features a fluorine-compatible clean chamber and a high throughput module for rapid resist removal. In addition, the system is equipped with GaSonics' SureStop Endpoint Detection system featuring a scanning monochromator.
GaSonics International (Nasdaq NM:GSNX) is a leading global supplier of integrated clean solutions. GaSonics' photoresist and residue removal tools improve device performance and increase yield in semiconductor manufacturing. GaSonics' technology leadership also includes vertical high-pressure (VHP) thermal processing for ultra-thin gate oxides and low-pressure chemical vapor deposition (LPCVD) for liquid-crystal display (LCD) manufacturing. Headquartered in San Jose, Calif., GaSonics supports its installed base of more than 4,500 systems through a global sales and support network. Additional information about the company is available on GaSonics' website, located at gasonics.com |
