Korean high-power semiconductor laser. I assume this is entirely unsuitable for DUV applications............
eet.com
Korean companies announce semiconductor advances
By B.H. Seo
EE Times
(11/18/98, 12:05 p.m. EDT)
SEOUL, South Korea — Korean companies are moving on several
fronts to develop next-generation semiconductor technologies.
LG Industrial Systems and its LG Technology Complex said on Nov.
12 that they will jointly commercialize a high-powered semiconductor
laser. The development marks the first time a Korean manufacturer has
brought a high-powered laser system to market, the companies said.
Separately, Jusong Engineering, a provider of semiconductor
manufacturing equipment, concluded a strategic alliance with Mattson
Technology Inc. (Fremont, Calif.) to jointly develop next-generation
equipment.
LG's work to commercialize a high-powered semiconductor laser
marks a first for a Korean manufacturer. U.S., German and French
systems are already commercially available.
LG's diode-based AlGaAs system is capable of producing a
high-powered laser light of more than 20 watts. LG said the compact
system is more stable and offers greater efficiency than currently
available systems that use discharge tubes as the excitation light source
for a solid-state laser.
LG Industrial Systems oversaw IC development on the project while
LG Technology Complex developed bonding and packaging
technology, company officials said.
Elsewhere, Jusong and Mattson said their alliance, concluded Nov. 12,
goes beyond a co-development agreement and aims to expand the
companies' share of the global equipment market. The equipment
developed under the agreement will be sold worldwide.
Mattson produces equipment for wafer pre-processing, including
photoresist strip, isotropic etch and rapid thermal processing systems.
The company has annual sales totaling $100 million in the Asian and
European markets.
Through the alliance, Jusong said it will gain access to Mattson's wafer
processing technology related to deposition and etching, including
chemical vapor deposition (CVD). In return, Mattson will get sole
overseas marketing rights to Jusong's process technology, such as
CVD equipment for capacitors, epitaxial growth systems and
high-density plasma-enhanced CVD.
The alliance also allows Mattson to market Jusong's products
worldwide, the partners said.
— Exclusive to EE Times by Chom Dan Inc. (Seoul, South Korea). |
