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Technology Stocks : General Lithography
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To: FJB who wrote (1103)11/21/1998 6:04:00 PM
From: Katherine Derbyshire   of 1305
 
Retrofitting with a 193nm laser would essentially require replacement of the lens. Not only would you need different materials, you would need different optical prescriptions. (There's a different word for it , I think, but I forget what it is.) You might also need to change the length of the optical path, which would mean raising or lowering the stage and/or lens. Once you do all that, plus replace the laser, plus deal with the degraded performance from using a non-optimized system, plus deal with reliability problems from things like resist outgassing, I'm not sure you wouldn't be better off just replacing the stepper.

Katherine
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