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Technology Stocks : JMAR Technologies(JMAR)
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To: timwa who wrote (7047)11/23/1998 8:51:00 PM
From: timwa  Read Replies (1) of 9695
 
EUV

When one is looking at the contenders for next generation lithography, they should keep in mind that JMAR is potentially a contender for both XRL and EUV.

jmar.com

Since 1992, JMAR's laser systems have been used on several occasions to produce EUV light for lithography research applications - initially under contract from Sandia National Laboratories and, subsequently, as part of an earlier LLNL/Intel consortium to lay the technical foundation for the current EUV program. JMAR's Picosecond X-ray Source (PXS) is routinely capable of producing the EUV light that will eventually be required by future EUV lithography systems. As EUV process technology matures JMAR expects to play a more active role as a supplier of high performance EUV sources.
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