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To: FJB who wrote (20322)	12/4/1998 10:57:00 AM
From: BillyG	Read Replies (2) of 25960

Nikon Releases Stepper for 0.18-0.15 Micron Rule ICs nikkeibp.asiabiztech.com December 4, 1998 (TOKYO) -- Nikon Corp. displayed a step-and-repeat (stepper) scanning system for 0.18-0.15 micron design rule microchips at the SEMICON Japan 98, a semiconductor manufacturing equipment and material exhibition, held through Dec. 4. Its NSR-S203B stepper will go on sale at the end of December. Among similar products for 0.18-0.15 micron design rule, Canon Inc. is already selling a model with the numerical aperture (NA) of 0.68 and ASM Lithography of the Netherlands is marketing a machine with an NA of 0.70. Nikon, Japan's largest manufacturer of stepper systems, is following suit. With new scanning-type stepper product lines being presented by leading manufacturers, the market appears to be converging on scanning steppers featuring NA levels of 0.68-0.70. The alignment accuracy of Nikon's new machine is 40nm, with a throughput of 85 wafers an hour (of 200mm wafers). The area of exposure is 25mm x 33mm. Nikon's new machine can be used for 200mm wafers as well as 300mm wafers. The price is about 850 million yen (US$6.9 million), according to Nikon. Related story: SEMICON Japan 98 Attracts Record Number of Participants (Nikkei Microdevices)

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