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Technology Stocks : Novellus
NVLS 2.400+2.1%Jul 24 5:00 PM EST

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To: Artslaw who wrote (1683)12/10/1998 1:57:00 PM
From: FJB  Read Replies (2) of 3813
 
Hi Steve,

Intel has always said that they won't be going to Cu until what they call their "0.13" process. Funny thing is, their "0.18" process has 0.13 physical gate lengths. Go figure. Intel must have mastered the production of PSMs.

Everybody else will be using copper before then. Don't dual damascene processes offer a cost advantage, because of fewer process steps? I guess they do, if you don't include the cost of new equipment and low initial yields. Can't you do something like "dual damascene" using aluminum for cost reduction?

Anyway, in case you did not see this, here's a little something on IBM's copper process.
almaden.ibm.com

Please offer some comments if you feel like it,

Bob

EDIT of post, sorry, if you were at the IEDM conference than you probably saw something more up to date than the above. Maybe someone else will like it.
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