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To: Ian@SI who wrote (20467)	12/17/1998 4:43:00 PM
From: FJB	Read Replies (2) of 25960

no one has an EUV light source being used today. TRW has an EUV source being used at Sandia for the 10X microstepper test bench. Some components are supplied by SDL. sdli.com There are at least six papers on different EUV source concepts being presented at the SPIE microlithography conference in March. Here's a good synopsis of EUVL. developer.intel.com Bob

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