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Technology Stocks : Cymer (CYMI)
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To: FJB who wrote (20472)12/18/1998 9:33:00 AM
From: Zeev Hed  Read Replies (2) of 25960
 
Robert, I do not see why not in principle. The "Proximity X-Ray Lithography system contemplates using as an X-Ray source the synchrotron radiation from an Electron Storage ring (one of the electron sources for FEL, the other is typically a linac (linear accelerator). The tunability of an FEL is not required for lithography, thus a fixed electron source and a fixed wigler tuned to let say 50 to 100 nm should be a much lower cost systems then the experimental FEL now in the field. I would guess that a light source selling for under a million bucks could be done and it would be competitive with most of the current schemes contemplated. The question of appropriate masks will still remain a critical element, but that is the same story with any post photonic based lithography system. Since the FEL is contemplated as a very high energy system (some even for :defense applications, I believe), energy should not be the limiting factor.

Zeev
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