Speedfam [SFAM] Lovers Unite ! Message Board

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Technology Stocks : Speedfam [SFAM] Lovers Unite !

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To: AJ Berger who wrote (3261)	12/18/1998 8:55:00 PM
From: Mr. Sam	Read Replies (5) of 3736

<<...is .18 micron production with good yields a viable reality, given the current state of fabrication equipment, testers, and human resources. I remember when we started out talking about SFAM, that .18 microns was kind of the sound barrier of current silicon fabrication technology, hence my skeptism.>> All of the technology needed for 0.18 micron devices is there. Such devices have been made in reasonable volumes and with reasonable yields in development fabs. When the demand is there to support increased supply, 0.18 micron fabs will be built and will be successful. For polish, the technology is comparable the the 0.25 generation. For lithography, 193 and 157 nm DUV lasers will work fine for the next decade. They should be ready for high-volume production when needed. For etch, the high-density sources that have been available for the last few years will work for 0.18 micron. For interconnect technology, copper with low-k dielectric is ready in the leading-edge development fabs. In short, there are no show-stoppers in sight. Mr. Sam

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