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Thought I'd note this here for more knowledgable persons to comment...
PATENT No: 5863017
ISSUE DATE: Jan-26-1999
Stabilized laser platform and module interface
ASSIGNEE:
Cymer, Inc. San Diego, CA
INVENTOR:
Larson; Donald Glenn San Diego, CA
deRuyter; Anthony John San Diego, CA
Mixon; Curtiss Lynn Encinitas, CA
Gerent; Jerry Rudy Vista, CA
OTHER DETAILS:
Legal Rep: Power; David J.
Application Date: Jan-05-1996
Application Number: 583380
Primary Examiner: Ramirez; Ramon O.
ABSTRACT:
A laser system support structure is provided having an independent, kinematically mounted chamber and optics platform. Swivel-type mounts are used to couple the platform at three points to the laser support frame, thereby allowing the platform to remain static while the support frame, via the swivel mounts, deflects around the platform in response to external forces. The independent platform design provides secondary benefits of creating a compartmentalization of laser system components, leading to a modular type design. Each laser system module is mounted to the support structure on an extension rail, to allow removal of the module from the support frame for easy access during servicing.
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