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To: Katherine Derbyshire who wrote (20808)1/30/1999 11:38:00 PM
From: FJB  Read Replies (1) of 25960
 
RE:Lambda Physik has a 193 nm laser which has been qualified for use in both ASML's and SVG's 193 nm step-and-scan systems.

Lambda has qualified KrF lasers at stepper vendors. Do you know how many KrF they shipped last fiscal year? Do you know how many have been qualified at semiconductor manufacturers? I don't want to leave people hanging, but the answer to the second question is zero. This from their press release:

It is anticipated that factory acceptance tests for steppers using Lambda's excimer lasers will begin within the second quarter of fiscal 1999.
biz.yahoo.com

Bob

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