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To: Clarksterh who wrote (20987)	2/3/1999 8:02:00 AM
From: Katherine Derbyshire	Read Replies (2) of 25960

>> Katherine - Re competition in 193nm. On what do you base the assertion that SVG is now shipping with Lambda? << On statements made by various SVG executives in last week's presentation announcing the MS 193. >>And on what basis did they (SVG and ASML) qualify the Lambda machines? (i.e. for trials or true production)<< I would say for trials and pilot production, since that's about where 193nm is these days. >> I can find very little information on it, although I did find a good article on the roadmap to DUV and EUV:<< For more details about SVG's roadmap from 193 nm to EUV, you might try: news.semiconductoronline.com Katherine

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