ATMI Announces New Sub-Atmospheric Gas Delivery System; NovaSource Unit Offers Unique Gas Delivery System for HDP-CVD
DANBURY, CT--(BUSINESS WIRE)--February 3, 1999--ATMI, Inc. (Nasdaq: ATMI), today announced that its NovaSource business is offering new sub-atmospheric gas delivery systems to the semiconductor industry for high-density plasma (HDP) chemical vapor deposition (CVD) following successful customer testing.
Results of qualification testing at a major North American semiconductor manufacturer validated sub-atmospheric gas sources for use with HDP-CVD systems in production manufacturing. NovaSource's new sub-atmospheric phosphine (PH3) source enabled the rapid integration of HDP-CVD phosphosilicate glass (PSG), a film that is finding use as a pre-metal dielectric for sub-0.25 micron device geometries. The sub-atmospheric gas delivery system was chosen to provide large volumes of PH3 gas with enhanced safety over the compressed gas alternatives.
Doug Neugold, NovaSource President, said, "The semiconductor industry has quickly integrated sub atmospheric technology for ion implant applications, taking advantage of safety and process flexibility improvements. ATMI NovaSource has numerous application development projects ongoing that will enable broad adoption of sub-atmospheric technology in various semiconductor manufacturing processes which use these hazardous gases. HDP-CVD is the latest application to move from the beta stage to be available for broad adoption by OEM's and customers."
ATMI's NovaSource business develops, manufactures, and sells sub-atmospheric gas delivery systems that provide innovations in productivity and safety to the semiconductor industry. The NovaSource technology uses special materials that bind specific gas molecules. This effectively converts "high-pressure" toxic gases into "no pressure" materials, allowing safer and higher volume storage.
ATMI, Inc. provides products and services for semiconductor device manufacture, including thin film materials and delivery systems marketed through ADCS, environmental equipment marketed through EcoSys, thin film deposition services marketed through Epitronics, and sub-atmospheric gas delivery systems marketed through NovaSource. |
