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Politics : Formerly About Advanced Micro Devices

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To: RDM who wrote (51059)2/26/1999 9:10:00 PM
From: Yousef  Read Replies (1) of 1572085
 
RDM,

Re: "I appreciate you guidance ... you stated the optical thickness of the
oxide layer but not the insulator thickness of the finished device."

RDM, the final gate oxide thickness doesn't change from the grown thickness.
Polysilicon is deposited right after the gate oxide anneal step and thus
there is no opportunity for the gate thickness to change. Some people
quote "electrical" gate oxide thickness ... For the .25um process, the
"electrical" thickness is typically 42A, but the physical thickness
is about 32A.

Make It So,
Yousef
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