Hyundai orders multiple ASML step and scan systems for DUV processing in its Eugene, OR fab......
semibiznews.com
A service of Semiconductor Business News, CMP Media Inc.
Story posted 4 p.m. EST/1 p.m. PST, 3/2/99
Hyundai orders ASML step-and-scan systems
for U.S. fab
By Jack Robertson
VELDHOVEN, The Netherlands -- ASM Lithography Holding N.V. today
confirmed that Hyundai Semiconductor America has ordered multiple
deep-UV step-and-scan systems for its Eugene, Ore., fab. Installation of the
0.18-micron-design-rule tools will begin at the fab this month.
It was reported previously by SBN that Hyundai had selected ASML as its
major lithography vendor for both its Korean and Eugene fabs (see Sept. 23,
1997, story). Soon Y. Hwang, semiconductor director of strategic
development for Hyundai in Seoul, said last week that Eugene fab was being
equipped with 0.18-micron-capable tools. He said the ASML scanners would
later be installed at the company's leading-edge Fab 7 in Ichon, Korea.
ASML is also a major supplier to Samsung Electronics in both its Korean and
Austin, Tex., fabs.
Hyundai paid $10 million to SVG Lithography, of Wilton, Conn., in a joint
development project for a 193-nm step-and-scan system. However, Hwang
said he wasn't sure when Hyundai would take delivery of the SVGL
Micrascan 193-nm system now going into production. Four other companies--
IBM, Intel, Motorola and Samsung -- also paid $10 million each in the SVGL
193-nm development. |
