Thread-this disturbs me......
Does Lambda have a viable product?
Any thoughts?
biz.yahoo.com
Wednesday March 17, 9:34 am Eastern Time
Company Press Release
Silicon Valley Group Strengthens
Leadership in Advanced Optical
Lithography With Key Strategic
Alliances to Support Industry's First
157 nm Development
Move With Lamda Physik, Schott, Bicron and Tropel Demonstrates Confidence,
Reinforcing Next-Generation Leadership and Extendibility of Optical
Lithography to EUV in New Century
SANTA CLARA, Calif.--(BUSINESS WIRE)--March 17, 1999-- In a move that clearly strengthens its
leadership in advanced optical lithography, Silicon Valley Group (Nasdaq:SVGI - news) announced today a
strategic agreement that involves key technology alliances with four leading supplier companies that will help
ensure the successful and timely development of its advanced 157nm deep ultraviolet (DUV) program -- an
industry first. The announcement, made at the opening of the annual SPIE exposition here in San Jose,
reinforces growing industry sentiment in the extendibility of DUV optical lithography and that 157nm will be the
key link to extreme ultraviolet (EUV) lithography as the Next Generation lithography of choice in the new
millennium.
Lambda Physik, one of two U.S.-based laser companies to have recently announced F2 laser capabilities, will
collaborate with SVG on testing its 157nm laser. The tests will be conducted in Lambda Physik's new laser test
facility in Florida. In addition, Germany-based Schott and U.S.-based Bicron have both signed on to supply
SVG with calcium fluoride, which is necessary to make lenses that can withstand a 157nm laser without
compromising performance below the .10 micron level. In related news, U.S.-based Tropel has joined with
SVG to continue development of SVG's innovative new miniscanner line, available in the summer of 2000,
which will help in supporting 157nm infrastructure efforts.
''We are extremely excited to be working with several industry leaders, both on the equipment and the customer
sides, in making this ground-breaking technology a reality,'' said John Shamaly Corporate vice president for the
corporation. ''Not so long ago, industry observers said that 157nm was not possible. Based on SVG's
technology, the industry is now a believer,'' he added.
According to company chairman and CEO, Papken Der Torossian, ''SVG's patented catadioptric lens system
enables us to make 157 nm technology a reality so soon. The growing importance of 157nm as the bridge to
EUV received even more support late last month when SEMATECH organized a high-level industry workshop
devoted to 157nm technology.'' There, Jim McClay, vice president and head of SVG's 157nm program, was
one of the speakers presenting data at the international event -- the first of its kind devoted solely to 157nm
technology. During the event, McClay delivered a powerful and comprehensive presentation demonstrating the
viability of 157nm. The presentation received positive overtures from several participants in the global supplier
and chip communities largely because of the results reported by SVG, which according to some observers,
support the belief that 157nm will be the ''bridge to EUV.''
''We, like many in the industry, believe that this is a winning solution that is credible and an effective bridge to
EUV in the new century and we are pleased that industry sentiment appears to be moving in that same
direction,'' commented Der Torossian.
Silicon Valley Group (Nasdaq:SVGI - news) is a leading manufacturer of automated wafer processing equipment
for the worldwide semiconductor industry. The company designs, manufactures and markets technically
sophisticated equipment used in the primary stages of semiconductor manufacturing. Its products include
photolithography exposure tools; photoresist processing equipment; oxidation, diffusion and low-pressure
chemical vapor deposition processing systems; and precision optical components and systems. For more
information, visit www.svg.com.
See Us at SPIE, Booth No. 707 |
