Some PR SVGI news today!
Wednesday March 17, 9:34 am Eastern Time
Company Press Release
Silicon Valley Group Strengthens
Leadership in Advanced Optical
Lithography With Key Strategic
Alliances to Support Industry's First
157 nm Development
Move With Lamda Physik, Schott, Bicron and Tropel Demonstrates
Confidence, Reinforcing Next-Generation Leadership and Extendibility of
Optical Lithography to EUV in New Century
SANTA CLARA, Calif.--(BUSINESS WIRE)--March 17, 1999-- In a move that clearly
strengthens its leadership in advanced optical lithography, Silicon Valley Group (Nasdaq:SVGI -
news) announced today a strategic agreement that involves key technology alliances with four leading
supplier companies that will help ensure the successful and timely development of its advanced
157nm deep ultraviolet (DUV) program -- an industry first. The announcement, made at the opening
of the annual SPIE exposition here in San Jose, reinforces growing industry sentiment in the
extendibility of DUV optical lithography and that 157nm will be the key link to extreme ultraviolet
(EUV) lithography as the Next Generation lithography of choice in the new millennium.
Lambda Physik, one of two U.S.-based laser companies to have recently announced F2 laser
capabilities, will collaborate with SVG on testing its 157nm laser. The tests will be conducted in
Lambda Physik's new laser test facility in Florida. In addition, Germany-based Schott and
U.S.-based Bicron have both signed on to supply SVG with calcium fluoride, which is necessary to
make lenses that can withstand a 157nm laser without compromising performance below the .10
micron level. In related news, U.S.-based Tropel has joined with SVG to continue development of
SVG's innovative new miniscanner line, available in the summer of 2000, which will help in
supporting 157nm infrastructure efforts.
''We are extremely excited to be working with several industry leaders, both on the equipment and
the customer sides, in making this ground-breaking technology a reality,'' said John Shamaly
Corporate vice president for the corporation. ''Not so long ago, industry observers said that 157nm
was not possible. Based on SVG's technology, the industry is now a believer,'' he added.
According to company chairman and CEO, Papken Der Torossian, ''SVG's patented catadioptric
lens system enables us to make 157 nm technology a reality so soon. The growing importance of
157nm as the bridge to EUV received even more support late last month when SEMATECH
organized a high-level industry workshop devoted to 157nm technology.'' There, Jim McClay, vice
president and head of SVG's 157nm program, was one of the speakers presenting data at the
international event -- the first of its kind devoted solely to 157nm technology. During the event,
McClay delivered a powerful and comprehensive presentation demonstrating the viability of 157nm.
The presentation received positive overtures from several participants in the global supplier and chip
communities largely because of the results reported by SVG, which according to some observers,
support the belief that 157nm will be the ''bridge to EUV.''
''We, like many in the industry, believe that this is a winning solution that is credible and an effective
bridge to EUV in the new century and we are pleased that industry sentiment appears to be moving
in that same direction,'' commented Der Torossian.
Silicon Valley Group (Nasdaq:SVGI - news) is a leading manufacturer of automated wafer
processing equipment for the worldwide semiconductor industry. The company designs,
manufactures and markets technically sophisticated equipment used in the primary stages of
semiconductor manufacturing. Its products include photolithography exposure tools; photoresist
processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing
systems; and precision optical components and systems. For more information, visit www.svg.com.
See Us at SPIE, Booth No. 707
Contact:
Silicon Valley Group
Werner Rust, 408/467-5949
rustw@svg.com
or
Mathews & Clark Communications
Stew Chalmers, 408/736-1120
schalmers@mathewsandclark.com |
