Let's just post the article:
Veeco unveils atomic force profiler
A service of Semiconductor Business News, CMP Media Inc.
Story posted 12:15 p.m. EST/9:15 p.m. PST, 3/17/99/h5>
SANTA BARBARA, Calif. -- The Veeco Metrology Group here has introduced what it claims is the first atomic force profiler for next-generation semiconductor and data-storage applications.
The Series Vx can scan up to 100 mm with true atomic force microscopy (AFM) resolution and 262,000 data points per line scan, and is 5 to 20 times faster than other profilers while maintaining superior lateral and vertical measurement of AFM. With patented TappingMode scanning, the Series Vx is completely non-destructive and does not modify fine surface features because it applies forces orders of magnitude lower than other profilometer, the company said.
"The resolution, speed, and multigenerational capabilities of this system will be of major importance for applications such as CMP [chemical mechanical planarization]," said Don Kania, vice president and grneral manager Veeco Metrology Group, "and we also expect the Series Vx to be used in other IC process areas such as etch and photoresist."
The Series Vx combines Veeco's long scan capabilities with Dimension AFM head technologies from Digital Instruments Inc., which Veeco acquired last year (see Feb. 10, 1998, story).
"The success of this joint development project between Veeco Instruments and Digital Instruments after our recent merger is indicative of the strong synergy between our two organizations creating the strongest line of surface metrology equipment in the world," commented Virgil Elings, president and co-founder of Digital Instruments.
Dan Hutcheson of VLSI Research Inc., a San Jose-based semiconductor industry analyst, said it was noteworthy that Veeco had brought to market a technology that is still in many other companies' labs. Veeco has been leading the charge for AFM, but the technology is still proving itself in production (see story in the Feb. 15 publication of SBN).
"The speed at which Veeco and Digital were able to bring this next-generation system to market is indicative of the complementary nature of their products and demonstrates that Veeco will continue to be at the forefront in leading edge metrology systems," said Hutcheson. |
