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Pastimes : The Justa & Lars Honors Bob Brinker Investment Club

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To: Lars who wrote (4275)	4/4/1999 10:48:00 PM
From: Ian@SI	Read Replies (1) of 15132

April 4, 1999 Canon Inc. Unveils DUV Strepper Dow Jones Newswires SANTA CLARA, Calif. -- Canon Inc.'s (CANNY) semiconductor equipment division unveiled a new high-throughput KrF stepper targeting the 150nm design rule. In a press release Sunday, Canon said the FPA-3000EX6, is a deep-UV stepper with an ultra-low aberration NA 0.65 lens that can expose 117 wafers per hour. The company said it is receiving orders for the new stepper and is scheduling deliveries beginning in September. The unit price is about $7 million, but varies according to specifications. Canon expects to sell 100 FPA-3000EX6's within the first year of introduction.

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